Residual vibration reduction of white-light scanning interferometry by input shaping.

Abstract

White-light scanning interferometry is widely used for precision metrology of engineering surfaces. It needs a mechanical scanning for capturing an interferogram that determines where the surface of a measured sample is located. The residual vibration during the scanning procedure distorts the interferogram and it reduces the accuracy and the precision of… (More)
DOI: 10.1364/OE.23.000464

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