Research on the resonant frequency formula of V-shaped cantilevers

@article{Yang2009ResearchOT,
  title={Research on the resonant frequency formula of V-shaped cantilevers},
  author={Kai Yang and Zhigang Li and Yupeng Jing and Dapeng Chen and Tianchun Ye},
  journal={2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year={2009},
  pages={59-62}
}
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity. 

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References

Publications referenced by this paper.
Showing 1-5 of 5 references

Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness

Frederic Lochon, Ludivine Fadel, Isabelle Dufour, Dominique Rebiere, Jacques Pistre
Materials Science and Engineering C, vol. 26, pp. 348-353, 2006. 62 • 2006
View 1 Excerpt

Analytical solution of flexural vibration responses on taped atomic force microscope cantilevers

Win-Jin Chang, Shao-Shu Chu
2003

Analytical solution of flexural vibration responses on taped atomic force microscope cantilevers," Physics Letters A

Win-Jin Chang, Shao-Shu Chu
vol. 309, pp. 133-137,2003. • 2003
View 2 Excerpts

Senturia, Microsystem Design (Book style)

D. Stephen
2000
View 1 Excerpt

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