Research on driving the MEMS ultrasonic separator based on two-dimensional normal mode


To improve the efficiency of a separator based on the two-dimensional normal mode, a driving model has been proposed in this paper. Firstly, two main problems influencing the efficiency of separation are discussed. Secondly, according to the structural characteristics of the separator, a model of double-sound sources with anti-phases to drive (1, 1) normal… (More)


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