Research on compensation of suction deformation error of potassium dihydrogen phosphate crystal.


Potassium dihydrogen phosphate (KDP) crystals used in high power laser systems require high figure accuracy. Deformation caused by vacuum suction is one of the most significant factors affecting the final surface figure accuracy. It is difficult to compensate the error caused by the suction deformation when using a single point diamond flycutting method… (More)
DOI: 10.1364/AO.52.000110


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