Remote power feed and control of MEMS with 58 V silicon photovoltaic cell made by a CMOS post-process dry release and device isolation method

A small autonomous device integrating MEMS, CMOS and photovoltaic (PV) cells has many attractive applications. For such a device, using light as a power source is preferable because power feeding and control signal transmitting can be done at the same time and in a remote manner. We demonstrated the remote power feeding to a MEMS actuator by light using PV… (More)