Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy

  title={Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy},
  author={Raden Dewanto and Tao Chen and Rebecca Cheung and Zhongxu Hu and Barry J. Gallacher and John Hedley},
  journal={2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)},
We propose an extension and improvement to reliability predictions in epitaxially grown 3C-SiC cantilever beam MEMS by utilizing dynamic Raman spectroscopy to allow the gathering of Weibull fracture test data to be done directly on devices thereby taking account of actual geometrical tolerances, dynamic load conditions and effects from the microfabrication process due to high lattice and thermal mismatch between 3C-SiC and Si. In this work, 3C-SiC devices were fabricated, modeled and actuated… CONTINUE READING
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