Reliability of MEMS for space applications

@inproceedings{Shea2006ReliabilityOM,
  title={Reliability of MEMS for space applications},
  author={Herbert R Shea},
  year={2006}
}
With their extremely low mass and volume, low power consumption and tight integration with electronics, MEMS sensors and actuators are extremely appealing for reducing the size and mass of spacecraft without sacrificing functionality. In view of the harsh and remote environment of space, reliability and qualification is the crucial issues that are holding back MEMS from playing a larger role in space applications. We examine how MEMS reliability is handled in commercial MEMS devices used in… CONTINUE READING

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