Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level

Abstract

Reliability of MEMS (MicroElectroMechanical-Systems) devices is a crucial aspect as it can discriminate the successful from partially or totally missed reaching of Microsystem technology based market products. However, the topic of MEMS reliability is significantly articulated, as it comprises numerous physics of failure and diverse failure mechanisms… (More)
DOI: 10.1016/j.displa.2014.08.003

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@article{Iannacci2015ReliabilityOM, title={Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level}, author={Jacopo Iannacci}, journal={Displays}, year={2015}, volume={37}, pages={62-71} }