Reliability issues in MuGFET nanodevices

  title={Reliability issues in MuGFET nanodevices},
  author={Guido Groeseneken and Felipe Crupi and A. Shickova and Steven Thijs and Dimitri Linten and Ben Kaczer and Nadine Collaert and Malgorzata Jurczak},
  journal={2008 IEEE International Reliability Physics Symposium},
In this paper we review some recent results on reliability of MuGFET nanodevices with different gate stacks, including polycrystalline-Si/SiON as well as deposited metal gate/high-k stacks. In the first part we show how we can get information on the interface quality of the sidewall and top interface of the devices, by using an adapted charge pumping… CONTINUE READING