Reliability analysis of CrSi Thin Film Resistors

  title={Reliability analysis of CrSi Thin Film Resistors},
  author={Chiea-Chuen Khor and Calvin Leung and Olivier Le Neel},
  journal={2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits},
CrSi Thin Film Resistor (TFR) is mainly used due to its high precision of less than 1% standard deviation and low thermal coefficient of resistance (TCR) with zero drift with temperature. Reliability characterization is studied on CrSi Thin Film Resistors (TFRs) to understand the reliability behaviour of CrSi Thin Film Resistors. Current sweep is performed on TFRs structures to determine current density threshold before catastrophic resistance degradation. Constant Current stress is performed… CONTINUE READING
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