• Corpus ID: 239616041

Reinforcement Learning for Process Control with Application in Semiconductor Manufacturing

@article{Li2021ReinforcementLF,
  title={Reinforcement Learning for Process Control with Application in Semiconductor Manufacturing},
  author={Yanrong Li and Juan Du and Wei Jiang},
  journal={ArXiv},
  year={2021},
  volume={abs/2110.11572}
}
  • Yanrong Li, Juan Du, Wei Jiang
  • Published 22 October 2021
  • Computer Science, Engineering
  • ArXiv
Process control is widely discussed in the manufacturing process, especially for semiconductor manufacturing. Due to unavoidable disturbances in manufacturing, different process controllers are proposed to realize variation reduction. Since reinforcement learning (RL) has shown great advantages in learning actions from interactions with a dynamic system, we introduce RL methods for process control and propose a new controller called RL-based controller. Considering the fact that most existing… 

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