Regimes of energy input in the pseudospark discharge in the sources of EUV radiation

@article{Korolev2002RegimesOE,
  title={Regimes of energy input in the pseudospark discharge in the sources of EUV radiation},
  author={Yu. D. Korolev and O. B. Frants and V. G. Geyman and R. V. Ivashov and N. V. Landl and I. A. Shemyakin},
  journal={2002 14th International Conference on High-Power Particle Beams (BEAMS)},
  year={2002},
  volume={2},
  pages={149-152}
}
The paper describes the regimes of energy input in the pseudospark discharge in typical conditions of EUV source operation. It is shown that in a mode of superdense glow discharge the electron temperature in the discharge plasma reaches rather high values without self-magnetic compression of the plasma channel.