Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness.

Abstract

We show that the optical properties of thin metallic films depend on the thickness of the film as well as on the deposition technique. Several thicknesses of electron-beam-gun-evaporated aluminium films were measured and the refractive index and the extinction coefficient defined using ellipsometry. In addition, the refractive indexes and the extinction… (More)

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@article{Lehmuskero2007RefractiveIA, title={Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness.}, author={Anni Lehmuskero and Markku Kuittinen and Pasi Vahimaa}, journal={Optics express}, year={2007}, volume={15 17}, pages={10744-52} }