Reflectometry-Ellipsometry Reveals Thickness, Growth Rate, and Phase Composition in Oxidation of Copper.

Abstract

The oxidation of copper is a complicated process. Copper oxide develops two stable phases at room temperature and standard pressure (RTSP): cuprous oxide (Cu2O) and cupric oxide (CuO). Both phases have different optical and electrical characteristics that make them interesting for applications such as solar cells or resistive switching devices. For a given… (More)
DOI: 10.1021/acsami.6b06626

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Cite this paper

@article{Leon2016ReflectometryEllipsometryRT, title={Reflectometry-Ellipsometry Reveals Thickness, Growth Rate, and Phase Composition in Oxidation of Copper.}, author={Juan J Diaz Leon and David M Fryauf and Robert D. Cormia and Min-Xian Zhang and Kathryn Samuels and R. Stanley Williams and Nobuhiko P. Kobayashi}, journal={ACS applied materials & interfaces}, year={2016}, volume={8 34}, pages={22337-44} }