Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials.

@article{Larruquert2002ReflectanceEI,
  title={Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials.},
  author={Juan Ignacio Larruquert},
  journal={Journal of the Optical Society of America. A, Optics, image science, and vision},
  year={2002},
  volume={19 2},
  pages={
          391-7
        }
}
Sub-quarterwave multilayer coatings with more than two different materials are shown to provide a reflectance enhancement compared with the standard two-material multilayer coatings when reflectance is limited by material absorption. A remarkable reflectance enhancement is obtained when the materials in the multilayer are moderately absorbing. A simple rule based on the material optical constants is provided to select the most suitable materials for the multilayer and to arrange the materials… CONTINUE READING