Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable | NIST

@inproceedings{Cassard2014ReferenceM8,
  title={Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable | NIST},
  author={Janet M. Cassard and Jon C. Geist and John Kramar},
  year={2014}
}

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