Reduction of Spikes on the Sides of Patterned Thin Films for Magnetic Tunnel Junction Based Molecular Device Fabrication

  title={Reduction of Spikes on the Sides of Patterned Thin Films for Magnetic Tunnel Junction Based Molecular Device Fabrication},
  author={Pawan Tyagi and Edward Friebe and Beachrhell Jacques and Tobias Goulet and Stanley Travers},
Sputter thin film deposition after photolithography often produces unwanted spikes along the side edges. These spikes are a significant issue for the development of magnetic tunnel junction (MTJ)-based memory and molecular spintronics devices, microelectronics, and microelectromechanical systems because they influence the properties of the other films deposited on the top. Our molecular spintronics devices that utilizes MTJ as the testbed are almost short-lived and encountered high background… 

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