Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition.

@article{Alasaarela2011ReducedPL,
  title={Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition.},
  author={Tapani Alasaarela and Dietmar Korn and Luca Alloatti and Antti S{\"a}yn{\"a}tjoki and Ari Tervonen and Robert Palmer and Juerg Leuthold and Wolfgang Freude and Seppo K. Honkanen},
  journal={Optics express},
  year={2011},
  volume={19 12},
  pages={11529-38}
}
When silicon strip and slot waveguides are coated with a 50 nm amorphous titanium dioxide (TiO2) film, measured losses at a wavelength of 1.55 μm can be as low as (2 ± 1)dB/cm and (7 ± 2)dB/cm, respectively. We use atomic layer deposition (ALD), estimate the effect of ALD growth on the surface roughness, and discuss the effect on the scattering losses. Because the gap between the rails of a slot waveguide narrows by the TiO2 deposition, the effective slot width can be back-end controlled. This… CONTINUE READING
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