Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition.

  title={Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition.},
  author={Tapani Alasaarela and Dietmar Korn and Luca Alloatti and Antti S{\"a}yn{\"a}tjoki and Ari Tervonen and Robert Palmer and Juerg Leuthold and Wolfgang Freude and Seppo K. Honkanen},
  journal={Optics express},
  volume={19 12},
When silicon strip and slot waveguides are coated with a 50 nm amorphous titanium dioxide (TiO2) film, measured losses at a wavelength of 1.55 μm can be as low as (2 ± 1)dB/cm and (7 ± 2)dB/cm, respectively. We use atomic layer deposition (ALD), estimate the effect of ALD growth on the surface roughness, and discuss the effect on the scattering losses. Because the gap between the rails of a slot waveguide narrows by the TiO2 deposition, the effective slot width can be back-end controlled. This… CONTINUE READING
Highly Cited
This paper has 39 citations. REVIEW CITATIONS


Publications citing this paper.
Showing 1-10 of 27 extracted citations


Publications referenced by this paper.
Showing 1-10 of 13 references

Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition

  • A. Saynatjoki, A. Tervonen, M. Kuittinen
  • Opt . Eng .
  • 2009

Focused - ionbeam fabrication of slots in silicon waveguides and ring resonators

  • J. V. Lysebettens J. Schrauwen, T. Claes, K. D. Vos, P. Bienstman, D. V. Thourhout, R. Baets
  • IEEE Photon . Technol . Lett .
  • 2008

Nonlinear silicononinsulator waveguides for alloptical signal processing

  • L. Jacome C. Koos, C. Poulton, J. Leuthold, W. Freude
  • Opt . Express
  • 2007

Experimental demonstration of guiding and confining light in nanometersize lowrefractiveindex material

  • K. B. Gylfason, R. Casquel
  • Opt . Lett .
  • 2004

Similar Papers

Loading similar papers…