Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image

@article{Fang1994ReconstructionOS,
  title={Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image},
  author={Weifu Fang and Kazufumi Ito},
  journal={SIAM Journal of Applied Mathematics},
  year={1994},
  volume={54},
  pages={1067-1082}
}
In this paper, the authors study the reconstruction of a semiconductor doping profile or, equivalently, the equilibrium potential, from its LBIC (laser-beam-induced current) image. For the one-dimensional case, the authors first characterize the attainable class of current measurements, and from this they show the nonuniqueness of the inverse problem. Then the reconstruction of the equilibrium potential is reduced to finding two constants subject to some constraints. A reconstruction algorithm… CONTINUE READING

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