Recent progress in high resolution lithography

  title={Recent progress in high resolution lithography},
  author={Daniel L. Bratton and Da Yang and Junyan Dai and Christopher K Ober},
  journal={Polymers for Advanced Technologies},
The nanotechnology revolution of the past decade owes much to the science of lithography, an umbrella term which encompasses everything from conventional photolithography to “unconventional” soft lithography and the self-assembly of block polymers. In this review, some of the recent advances in lithography are summarized with special reference to the microelectronics industry. The next generation photolithography, two-photon lithography, step-and-flash imprint lithography and nanofabrication… Expand

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