Recent developments in IR metrology using quadri wave lateral shearing interferometry

@inproceedings{Boucher2015RecentDI,
  title={Recent developments in IR metrology using quadri wave lateral shearing interferometry},
  author={William David Boucher and Guillaume Bourgeois and Maxime Deprez and Etienne Homassel and B Wattellier},
  booktitle={SPIE Optifab},
  year={2015}
}
We present various applications of Quadri Wave Lateral Shearing Interferometry to infrared optical metrology. Phasics has developed wave front sensors compatible with wavelengths ranging from 193nm to 14 μm. Several camera technologies are integrated with patented diffractive optics adapted to the various spectral ranges. In the infrared range, InGaAs, MCT and microbolometers are used as light sensors. We developed a bench to qualify lenses with diameter from 2mm to 100mm in the LWIR spectral… CONTINUE READING