Recent Progress in SFQ Device Technologies in Japan

@article{Tanabe2007RecentPI,
  title={Recent Progress in SFQ Device Technologies in Japan},
  author={K.. Tanabe and M. Hidaka},
  journal={IEEE Transactions on Applied Superconductivity},
  year={2007},
  volume={17},
  pages={494-499}
}
Recent progress in single flux quantum (SFQ) device technologies in Japan is described, mainly focusing on those developed in the NEDO "Superconductors Network Device Project" which includes developments of both LTS and HTS devices. The advanced Nb process which consists of a planarized structure with nine Nb layers and 10 kA/cm2 Josephson junctions (JJs) has been developed. This enables fabrication of chips including 100,000 JJs and operating frequency up to 80 GHz. We have also developed the… CONTINUE READING
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