Receiving properties of thin-film spiral antenna on Si3N4 membrane at 200 GHz band

Abstract

A Thin-film spiral antenna coupled with Bi microbolometer operating at 200 GHz band was fabricated on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> membrane. The experimental antenna patterns agreed well with theoretical ones, and wide band characteristic of the antenna ranging from 140 to 220 GHz was obtained. 

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