Realization of quartz MEMS accelerometer based on flip chip process

Abstract

This research attends to provide a simple and effective way to precisely assemble a quartz MEMS accelerometer, which is composed of a double-ended tuning fork (DETF) force transducer, and a base-proof mass structure. Flip chip method is proposed to bond the two sides of DETF in length direction onto the base and proof mass structure via AuSn solder… (More)
DOI: 10.1109/NEMS.2013.6559933

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