Realization of Vertical and Zigzag Single Crystalline Silicon Nanowire Architectures

@inproceedings{Sivakov2010RealizationOV,
  title={Realization of Vertical and Zigzag Single Crystalline Silicon Nanowire Architectures},
  author={Vladimir Sivakov and Gerald Broenstrup and B{\'e}la P{\'e}cz and Andreas Berger and Gy{\"o}rgy Radn{\'o}czi and Michal Krause and Silke Christiansen},
  year={2010}
}
Silicon nanowire (SiNW) ensembles with vertical and zigzag architectures have been realized using wet chemical etching of bulk silicon wafers (p-Si(111) and p-Si(100)) with a mask of silver nanoparticles that are deposited by wet electroless deposition. The etching of SiNWs is based on subsequent treatments in chemical solutions such as 0.02 M aqueous solutions of silver nitrate (AgNO3) followed by 5 M hydrofluoric acid and 30% hydrogen peroxide (H2O2). The etching of the Si wafers is mediated… CONTINUE READING

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