Real-time study of -Si:H/c-Si heterointerface formation and epitaxial Si growth by spectroscopic ellipsometry, infrared spectroscopy, and second-harmonic generation

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@inproceedings{Gielis2017RealtimeSO, title={Real-time study of -Si:H/c-Si heterointerface formation and epitaxial Si growth by spectroscopic ellipsometry, infrared spectroscopy, and second-harmonic generation}, author={Gielis and J.J.H and van den Oever and P. J. Hoex and B. van de Sanden and Michael M Kessels}, year={2017} }