Real-time dual-wavelength digital holographic microscopy for MEMS characterization

  title={Real-time dual-wavelength digital holographic microscopy for MEMS characterization},
  author={J. Kuehn and T. Colomb and F. Montfort and F. Charri{\'e}re and Y. Emery and E. Cuche and P. Marquet and C. Depeursinge},
  booktitle={International Symposium on Optomechatronic Technologies},
  • J. Kuehn, T. Colomb, +5 authors C. Depeursinge
  • Published in
    International Symposium on…
  • Engineering, Physics
  • We present a method to achieve real-time dual-wavelength digital holographic microscopy (DHM) measurements of micro-electro-mechanical systems (MEMS) with a single camera acquisition. Indeed, while DHM is a technique of choice for MEMS investigation, thanks to its high-speed full-field complex wavefront reconstruction compatible with stroboscopic or pulsed operation modes, the nanometer-resolved phase information available suffers from a so-called phase ambiguity when the optical path length… CONTINUE READING


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