Real-time dual-wavelength digital holographic microscopy for MEMS characterization

@inproceedings{Kuehn2007RealtimeDD,
  title={Real-time dual-wavelength digital holographic microscopy for MEMS characterization},
  author={J. Kuehn and T. Colomb and F. Montfort and F. Charri{\'e}re and Y. Emery and E. Cuche and P. Marquet and C. Depeursinge},
  booktitle={International Symposium on Optomechatronic Technologies},
  year={2007}
}
  • J. Kuehn, T. Colomb, +5 authors C. Depeursinge
  • Published in
    International Symposium on…
    2007
  • Engineering, Physics
  • We present a method to achieve real-time dual-wavelength digital holographic microscopy (DHM) measurements of micro-electro-mechanical systems (MEMS) with a single camera acquisition. Indeed, while DHM is a technique of choice for MEMS investigation, thanks to its high-speed full-field complex wavefront reconstruction compatible with stroboscopic or pulsed operation modes, the nanometer-resolved phase information available suffers from a so-called phase ambiguity when the optical path length… CONTINUE READING

    References

    Publications referenced by this paper.
    SHOWING 1-10 OF 18 REFERENCES
    Digital holographic microscopy with dual-wavelength phase unwrapping.
    • 126
    • PDF
    Phase imaging without 2pi ambiguity by multiwavelength digital holography.
    • 292
    • PDF
    Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
    • 21
    Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)
    • 27
    A New Microscopic Principle
    • 3,164
    • PDF