Real image resolution of SEM and low-energy SEM and its optimization: distribution width of the total surface emission.

@article{Frank1996RealIR,
  title={Real image resolution of SEM and low-energy SEM and its optimization: distribution width of the total surface emission.},
  author={Ludek Frank},
  journal={Ultramicroscopy},
  year={1996},
  volume={62 4},
  pages={261-9}
}
The real point resolution of an SEM image is treated in a two-dimensional model where the decisive quantity is the root-mean-square distance of the emitted electron from the pixel centre. This quantity is computed taking into account the direct illumination of the specimen surface by the primary spot the dimensions of which are given by the electron optical column and the indirect illumination from a virtual source of the backscattered electrons in the specimen depth the properties of which… CONTINUE READING