Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer

@article{Dias2015RealTimeOA,
  title={Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer},
  author={Rosana Alves Dias and Filipe Serra Alves and Margaret Costa and Helder Fonseca and Jorge Miguel Cabral and Jo{\~a}o Gaspar and Lu{\'i}s Alexandre Rocha},
  journal={Journal of Microelectromechanical Systems},
  year={2015},
  volume={24},
  pages={1703-1711}
}
An accelerometer based on the electrostatic pull-in time of a microstructure is presented in this paper. The device uses a parallel-plate overdamped microstructure, and real-time control operation is performed using a field programmable gate array and high precision digital-to-analog converters. Both open-loop and closed-loop measurements are presented. The… CONTINUE READING