Rare-metal-free high-performance Ga-Sn-O thin film transistor
@article{Matsuda2017RaremetalfreeHG, title={Rare-metal-free high-performance Ga-Sn-O thin film transistor}, author={Tokiyoshi Matsuda and Kenta Umeda and Yuta Kato and Daiki Nishimoto and Mamoru Furuta and Mutsumi Kimura}, journal={Scientific Reports}, year={2017}, volume={7} }
Oxide semiconductors have been investigated as channel layers for thin film transistors (TFTs) which enable next-generation devices such as high-resolution liquid crystal displays (LCDs), organic light emitting diode (OLED) displays, flexible electronics, and innovative devices. Here, high-performance and stable Ga-Sn-O (GTO) TFTs were demonstrated for the first time without the use of rare metals such as In. The GTO thin films were deposited using radiofrequency (RF) magnetron sputtering. A…
49 Citations
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