Rapid turnaround scanning probe nanolithography.


Scanning probe nanolithography (SPL) has demonstrated its potential in a variety of applications like 3D nanopatterning, 'direct development' lithography, dip-pen deposition or patterning of self-assembled monolayers. One of the main issues holding back SPL has been the limited throughput for patterning and imaging. Here we present a complete lithography… (More)
DOI: 10.1088/0957-4484/22/27/275306



Citations per Year

Citation Velocity: 12

Averaging 12 citations per year over the last 3 years.

Learn more about how we calculate this metric in our FAQ.