Rapid fabrication of a silicon modification layer on silicon carbide substrate.

Abstract

We develop a kind of magnetorheological (MR) polishing fluid for the fabrication of a silicon modification layer on a silicon carbide substrate based on chemical theory and actual polishing requirements. The effect of abrasive concentration in MR polishing fluid on material removal rate and removal function shape is investigated. We conclude that material… (More)
DOI: 10.1364/AO.55.005814

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Cite this paper

@article{Bai2016RapidFO, title={Rapid fabrication of a silicon modification layer on silicon carbide substrate.}, author={Yang Bai and Longxiang Li and Donglin Xue and Xuejun Zhang}, journal={Applied optics}, year={2016}, volume={55 22}, pages={5814-20} }