Rapid fabrication and piezoelectric tuning of micro- and nanopores in single crystal quartz.

Abstract

We outline the fabrication of piezoelectric through-pores in crystalline quartz using a rapid micromachining process, and demonstrate piezoelectric deformation of the pore. The single-step fabrication technique combines ultraviolet (UV) laser irradiation with a thin layer of absorbing liquid in contact with the UV-transparent quartz chip. The effects of… (More)
DOI: 10.1039/c2lc40925a

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