• Chemistry
  • Published 2014

Rapid Depth Profiling via High Irradiance Laser Ionization Orthogonal Time-of-Flight Mass Spectrometry

@inproceedings{Bin2014RapidDP,
  title={Rapid Depth Profiling via High Irradiance Laser Ionization Orthogonal Time-of-Flight Mass Spectrometry},
  author={Li Bin and He Miao-Hong and Yu Shu-yuan and Liu Zhi-hong and Hang Wei and Huang Ben-li and 杭纬 and 黄本立},
  year={2014}
}
As a relatively new technique,high irradiance laser( 4.5 ns,532 nm,9×109W / cm2) ionization orthogonal time-of-flight mass spectrometry( LI-O-TOFMS) has been applied for depth profile analysis of various coated samples as well as element determination with respect to depth in solid samples. This technique is capable of performing depth profiling of coated layer with a thicknesses from sub-micrometer to tens micrometer scale; and can examine samples with monolayer and multilayer coated. Compared… CONTINUE READING