Rapid, cost-efficient fabrication of microfluidic reactors in thermoplastic polymers by combining photolithography and hot embossing.

@article{Greener2010RapidCF,
  title={Rapid, cost-efficient fabrication of microfluidic reactors in thermoplastic polymers by combining photolithography and hot embossing.},
  author={J. Greener and W. Li and J. Ren and D. Voicu and V. Pakharenko and Tianyu Tang and E. Kumacheva},
  journal={Lab on a chip},
  year={2010},
  volume={10 4},
  pages={
          522-4
        }
}
We report a cost-efficient and easy to implement process for fabricating microfluidic reactors in thermoplastic materials. The method includes (i) the fabrication of an imprint template (master), which consists of a photoresist deposited on a metal plate; (ii) the thermoembossing of the reactor features into polymer sheets; (iii) the activation of the embossed and planar thermoplastic surfaces; and (iv) the low-temperature bonding of these surfaces. The generality of the method is established… Expand
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