Raman and Eels Studies on Nanocrystalline Diamond Prepared in a Low Pressure Inductively Coupled Plasma

Abstract

Nanocrystalline diamonds with several hundred nim in diameter have been prepared in a 13.56 MHz low pressure inductively coupled CH4/H 2 or CH4/CO/H 2 plasma. The bonding structures were investigated by Raman spectroscopy and electron energy loss spectroscopy (EELS). Visible (514 nm) and UV (325, 244 nm) excited Raman spectra with CO additive exhibit peaks… (More)

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