Radio-frequency optomechanical characterization of a silicon nitride drum

  title={Radio-frequency optomechanical characterization of a silicon nitride drum},
  author={A. N. Pearson and Kiran E. Khosla and Matthias Mergenthaler and G. Andrew D. Briggs and Edward A. Laird and Natalia Ares},
  journal={Scientific Reports},
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a lumped element circuit. Despite a low cavity quality factor ( Q E  ≈ 7.4) and off resonant, room temperature operation, we are able to parametrize several mechanical modes and estimate their optomechanical coupling strengths. This enables real-time… Expand
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