Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures

@article{Hoevers2005RadiativeBP,
  title={Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures},
  author={Henk F. C. Hoevers and M. L. Ridder and Alexander Germeau and Marcel P. Bruijn and P. A. J. Korte and Remco J. Wiegerink},
  journal={Applied Physics Letters},
  year={2005},
  volume={86},
  pages={251903}
}
We studied the phonon transport in free-standing 1 µm thick silicon-nitride membranes at temperatures around 100 mK. By varying the geometry of the membranes and the dimensions of the heater element, we are able to distinguish between radiative and diffuse phonon transport. The data indicate that the transport is radiative ballistic with a lower limit to a phonon mean-free path of about 1 mm and that the probability for specular reflection from the surface is at least 0.99. The tested silicon… 

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References

SHOWING 1-10 OF 20 REFERENCES

Thermal characteristics of silicon nitride membranes at sub-Kelvin temperatures

We have performed calorimetric measurements on 200 nm thin silicon nitride membranes at temperatures from 0.07 to 1 K. Besides full windows, membranes cut into a thermally isolating suspended bridge

Measurements of thermal transport in low stress silicon nitride films

We have measured the thermal conductance, G, of ≈1 μm thick low stress silicon nitride membranes over the temperature range, 0.06 4 K, G is independent of surface condition indicating that the

Properties of the Phonon Gas in Ultrathin Membranes at Low Temperature

We analyze heat conduction by phonons in ultrathin membranes by constructing a new theoreticalframework which implies a crossover from a bulk three-dimensional phonon distribution into a

Phonon radiative heat transfer and surface scattering.

The thermal-conductance measurements provide a very sensitive and precise technique for studying diffuse phonon scattering at crystal surfaces, and it is found that the authors' highly polished and clean silicon surfaces will specularly reflect more than 99% of the incident phonons below 1 K, temperatures which correspond to dominant phonon frequencies less than 90 GHz.

Model for cryogenic particle detectors with superconducting phase transition thermometers

We present data on a detector composed of an 18 g Si crystal and a superconducting phase transition thermometer which could be operated over a wide temperature range. An energy resolution of 1 ke V

X‐ray detection using a superconducting transition‐edge sensor microcalorimeter with electrothermal feedback

We have developed a new type of x‐ray detector based on a superconducting transition‐edge thermometer operated near 100 mK. A superconducting quantum interference device is used to measure the

Hot-electron effects in metals.

The flux noise in dc SQUIDs at low temperatures is measured, and it is found that the white noise was limited bymore » heating of the electrons in the resistive shunts of the Josephson junctions, which was able to reduce substantially by attaching cooling fins to the shunts.

Bolometers for infrared and millimeter waves

This review describes bolometric detectors for infrared and millimeter waves. The introduction sketches the history of modern bolometers, indicates how they fit into the more general class of thermal