RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Yüzey Özellikleri

@inproceedings{enay2019RFMS,
  title={RF Magnetron Sıçratma ile Sentezlenen Nano Yapılı ZnO Yarıiletken İnce Filmlerin Optik ve Y{\"u}zey {\"O}zellikleri},
  author={Volkan Şenay},
  year={2019}
}
In this research, ZnO thin films were deposited on glass microscope slides in three separate experiments with RF input powers of 50 W, 100 W and 125 W by means of RF magnetron sputtering technique. Each deposition process was conducted for 30 minutes. Spectroscopic reflectometer , UV-VIS spectrophotometer and atomic force microscope (AFM) were used to examine the effect of sputtering power on the optical and surface properties of the produced thin films. The level of reflectivity and… Expand

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