RF MEMs variable capacitors for tunable filters

@article{Goldsmith1999RFMV,
  title={RF MEMs variable capacitors for tunable filters},
  author={Charles L. Goldsmith and Andrew Malczewski and Zhimin J. Yao and Shea Chen and John C. Ehmke and David H. Hinzel},
  journal={International Journal of Rf and Microwave Computer-aided Engineering},
  year={1999},
  volume={9},
  pages={362-374}
}
() ABSTRACT: An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a 22:1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70:1 to 100:1, control voltages in the 30-55 V range, switching speeds less than 10 mS, and operating frequencies as high as 40 GHz. These devices may eventually provide a viable alternative to electronic varactors with improved… Expand
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