RF MEMS components using CMOS technology

  title={RF MEMS components using CMOS technology},
  author={Mehmet Ozgur and M. B. Zaghloul},
  journal={IEEE Antennas and Propagation Society International Symposium. 2001 Digest. Held in conjunction with: USNC/URSI National Radio Science Meeting (Cat. No.01CH37229)},
  pages={678-681 vol.3}
Recently microelectromechanical systems (MEMS) devices have become an important technology that is used in many applications. We describe post-processing steps of CMOS technology to implement a MEMS structure suitable for RF systems. We describe CMOS-based monolithic MEMS structures suitable for realizing passive RF components operating at frequencies of up… CONTINUE READING