Fabrication and Modeling of a Capacitor Microfluidically Tuned by Water
- Nizar Habbachi, Hatem Boussetta, Ali Boukabache, Mohamed Adel Kallala, Patrick Pons, Kamel Besbes
- IEEE Electron Device Letters
- 2017
1 Excerpt
RF MEMS Zipping Varactor With High Quality Factor and Very Large Tuning Range
- Published 2016 in IEEE Electron Device Letters
Abstract
An RF MEMS zipping analog varactor with a high-permittivity bismuth zinc niobate dielectric has been fabricated and characterized. The varactor can be continuously tuned from 10 to 280 fF, with a very large tuning range of 2700%. By use of gold electrodes to ensure a low series resistance, the high quality factors of 317 and 63 at 1 GHz were measured for… (More)