Quartz crystal microbalance-based system for high-sensitivity differential sputter yield measurements.

Abstract

We present a quartz crystal microbalance-based system for high sensitivity differential sputter yield measurements of different target materials due to ion bombardment. The differential sputter yields can be integrated to find total yields. Possible ion beam conditions include ion energies in the range of 30-350 eV and incidence angles of 0 degrees-70… (More)
DOI: 10.1063/1.3249560

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Cite this paper

@article{Rubin2009QuartzCM, title={Quartz crystal microbalance-based system for high-sensitivity differential sputter yield measurements.}, author={Binyamin Rubin and J. L. Topper and Casey C. Farnell and Azer P. Yalin}, journal={The Review of scientific instruments}, year={2009}, volume={80 10}, pages={103506} }