Quantum mechanical actuation of microelectromechanical systems by the Casimir force.

  title={Quantum mechanical actuation of microelectromechanical systems by the Casimir force.},
  author={H B Chan and Vladimir A Aksyuk and Rafael N. Kleiman and D. J. Bishop and Federico Capasso},
  volume={291 5510},
The Casimir force is the attraction between uncharged metallic surfaces as a result of quantum mechanical vacuum fluctuations of the electromagnetic field. We demonstrate the Casimir effect in microelectromechanical systems using a micromachined torsional device. Attraction between a polysilicon plate and a spherical metallic surface results in a torque that rotates the plate about two thin torsional rods. The dependence of the rotation angle on the separation between the surfaces is in… CONTINUE READING
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