Quantum lithography: A non-computing application of quantum information

 Quantum lithography: A non-computing application of quantum information
  author={Colin P. Williams and Pieter Kok and Hwang Lee and Jonathan P. Dowling},
  journal={Informatik - Forschung und Entwicklung},
AbstractQuantum information theory holds the promise of revolutionizing technologies other than computing and communications. In this article we show how quantum entanglement can be harnessed to beat the Rayleigh diffraction limit of conventional optical lithography, and to permit nano-devices to be fabricated at a scale arbitrarily shorter than the wavelength used. Given the relative ease of performing optical lithography compared with other schemes, and the relative costs associated in… 

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  • Milburn
  • Physics
    Physical review letters
  • 1989
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