Quantum Mechanical Actuation of Microelectromechanical Systems by the Casimir Force

  title={Quantum Mechanical Actuation of Microelectromechanical Systems by the Casimir Force},
  author={Ho Bun Chan and Vladimir A. Aksyuk and Rafael N. Kleiman and David J. Bishop and Federico Capasso},
  pages={1941 - 1944}
The Casimir force is the attraction between uncharged metallic surfaces as a result of quantum mechanical vacuum fluctuations of the electromagnetic field. We demonstrate the Casimir effect in microelectromechanical systems using a micromachined torsional device. Attraction between a polysilicon plate and a spherical metallic surface results in a torque that rotates the plate about two thin torsional rods. The dependence of the rotation angle on the separation between the surfaces is in… 
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