Quantitative aspects of optical IC debug using state-of-the-art backside preparation

@article{Boit2012QuantitativeAO,
  title={Quantitative aspects of optical IC debug using state-of-the-art backside preparation},
  author={Christian Boit and Arkadiusz Glowacki and C. Pagano and Uwe Kerst and Yoshiyuki Yokoyama},
  journal={2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits},
  year={2012},
  pages={1-6}
}
Backside preparation techniques have advanced to provide reliable IC performance for bulk silicon as thin as 10μm and less (here called moderately thin=MTSi). This opens many doors for optical localization techniques as photons >; 1.1 eV can be detected through backside. Now, Si and InGaAs detectors can be compared directly for photon emission (PE) and this paper investigates in depth what is important when it comes to understanding PE spectra. The advantages of Si detectors are demonstrated… CONTINUE READING
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References

Publications referenced by this paper.
Showing 1-10 of 11 references

P.Perdu,"Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning", J.Microelelctronics and reliability

  • A. Glowacki, C. Boit
  • ISSN 0026-2714,
  • 2011
3 Excerpts

Performance improvement of Si - CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning "

  • C. Boit Glowacki, P. Perdu
  • J . Microelelctronics and reliability
  • 2011

Development and Evaluation of Novel Chip Modificationand Analysis-Techniques, based on Backside Focused Ion Beam Preparation

  • R. Schlangen
  • PhD Thesis, http://opus.kobv.de/tuberlin…
  • 2010

Quantitative emission microscopy ”

  • C. Boit J. Koelzer, A. Dallmann, G. Deboy, J. Otto, D. Weinmann
  • J . Appl . Phys .
  • 1992

Discrimination of parasitic bipolar operating modes in ICs with emission microscopy

  • J. Koelzer C. Boit, H. Benzinger, A. Dallmann, M. Herzog, J. Quincke
  • 1990

The spectroscopic signature of light emitted by integrated circuits

  • K. de Kort, P. Damink
  • Proc. ESREF,
  • 1990
1 Excerpt

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