Quantitative HRTEM analysis of FIB prepared specimens

@article{Baram2008QuantitativeHA,
  title={Quantitative HRTEM analysis of FIB prepared specimens},
  author={Mor Baram and Wayne D. Kaplan},
  journal={Journal of Microscopy},
  year={2008},
  volume={232}
}
The preparation of good transmission electron microscopy specimens with minimum milling damage can be very complicated, especially from a specific area in a sample. Therefore, a novel approach for transmission electron microscopy specimen preparation using a focused ion beam system is proposed, based on the use of low energy (5 kV)Ga ions and a low incident ion angle (∼1°) from a thickness of ∼500 nm until the sample is electron transparent. Transmission electron microscopy specimens prepared… 
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