Quantitative Boundary Support Characterization for Cantilever MEMS

Abstract

Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be… (More)
DOI: 10.3390/s7102062

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