Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators

Abstract

We report measurements on quality factors (Q's) of single-crystal silicon nanowire (SiNW) resonators operating in the very-high frequency (VHF) range. Q's of ~200 MHz metalized SiNWs are considerably lower than those of the pristine SiNWs operating at similar frequencies. The observed damping effect due to resonance transduction agrees well with the loaded… (More)

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